PRODUCT WAFER AUTO LOADER

PRODUCT

WAFER AUTO LOADER

WAFER AUTO LOADER

Wafer Auto Loader是解决生产商的不便，能够让操作者安全工作的全自动化晶圆传输设备。

  • Wafer Size
    • Graphic Touch Panel
      • Boat loading
      • Boat unloading
      • Sequence
      • Operation
  • PLC Controller
    • PLC Controller
      • Motion
      • Safety Control
      • Sequence
      • Operation
  • MOTION UNIT
    • Gripper Driver
    • Load platform Driver
    • Y-Axis Driver
    • Z-Axis Driver
    • Gripper motor
    • Load platform motor
    • Y-Axis motor
    • Z-Axis motor
  • SAFETY & SENSOR UNIT
    • SAFETY
    • SENSOR