Lab's technology-driven products and technological level

• TRL (Technology Readiness Level) : Towards the commercialization phase of level 9
• Designing and developing technologies for 6, 8”Wafer Vertical Furnace system semiconductor operational device
• Designing and developing technologies for 6, 8”Wafer Horizontal Furnace system semiconductor operational device
• Holds the new technology for improving material/parts/equipment for the 6, 8”Vertical & Horizontal Furnace system semiconductor operational equipment and new technology for localization

Other Information

Lab's own technologies and technology development data

• Semiconductor processing technology, gas flow control technology, equipment operation mechanism technology
• Pneumatic technology, semiconductor electronic parts technology
• Vacuum furnace technology, heat control technology
• Design and development technology for semiconductor equipment operation HW (part module, frame etc.)
• Design and development technology for semiconductor equipment operation SW (PLC)
• Technologies for developing and repairing semiconductor equipment at home and overseas
• Technologies for localizing semiconductor equipment material/parts/equipment in and out of country

Product development outcome

No.	Business Division	Main functional/business contents	Remark
1	150-300mm V/F business	Uniformity Heat Zone Implemented 400~800℃±0.3℃ Control Implemented 800~1300℃±0.5℃ Control Entered and preoccupied the system semiconductor markets at home and abroad Companies responsible for sales and installation : SK Hynix System IC, DB Hitek, KEC etc.
2	150-300mm H/F Business	Uniformity Heat Zone Implemented 400~800℃±0.3℃ Control Implemented 800~1300℃±0.5℃ Control Entered and preoccupied the system semiconductor markets at home and abroad Companies responsible for sales and installation : SK Hynix System IC, DB Hitek, KEC etc.
3	Wafer Auto Loader Business	Graphic Touch Panel(Boat loading & Unloading, Sequence etc.) Control Unit(Motion, Safety Control etc) Motion Unit(Gripper Driver, X-Y-Z-R Axis Driver & Motor etc.)
4	Baking Oven Business	50-300℃±1℃ Safety Interlock Over Heat Interlock 15 Inch Color Screen
5	Furnace Refurbish & Relocation	TEL α-8S, α-8SN & α-8SE Series TEL VCF-615 TEL IW-6 TEL 303i KE DD/DJ-802V, 813V, 815V, 823V, 825V, 835V, 853V Series etc.
6	S/W Program & Material/Parts/Equipment Localization Business	Equipment Operation PLC Repair＆Overhaul Material/Parts/Equipment Localization (escaping reliance on foreign companies), etc.