PRODUCT VERTICAL FURNACE : CROVE-V6, V8 Series

PRODUCT

VERTICAL FURNACE : CROVE-V6, V8 Series

VERTICAL FURNACE : CROVE-V6, V8 Series

CROVE-VERTICAL Series are the batch handling equipment which achieved high throughput by shortening the cycle
based on our core technologies including temperature control, auto conveyor, vacuum/gas replacement, and cooling technologies.

  • Wafer Size
    • 150~200mm
  • Application Process
    • Batch Thermal Process Equipment
    • Thin Film Process Technology
    • High Temperature Anneal Equipment
    • Thermal Process Equipment for 200mm Wafer
  • Performance
    • Uniformity Heating Zone 400~1250℃
  • Equipment Highlights
    • Capable of batch process up to 150 wafers
    • High throughput by shortening the cycle time
    • Implements Boat Wafer Mapping System
    • Increases utilization rate and reduces downtime with parts upgrade
    • Can mount a high-speed Ramp Up/Down Heater
    • Window-type operation enhancement