PART DEVELOP KE Wafer Counter Sensor

PART DEVELOP

KE Wafer Counter Sensor

KE Wafer Counter Sensor

Completed verification on the development and compatibility test of replacement parts due to discontinuation of the old parts (SK System IC)

 
 
 
1 Category Specification
1 Applicable wafer 8inch
2 Number of channels 25ch / 26ch
3 Detection method Through beam
4 Wafer Pitch 6.35mm
5 Power supply DC24V ±10% ripple 10 or less
6 Current consumption 1.8W or less
7 Operation mode Dark ON
8 Output mode NPN open collector
9 Light source Infrared LED (830nm)
10 Output inhibit input Output inhibit ON : 1.5V or less OFF : 4V or more
11 Material Sensor unit : Polycamonate / Housing : Aluminum