PRODUCT HORIZONTAL FURNACE : CROVE-H6, H8 Series

PRODUCT

HORIZONTAL FURNACE : CROVE-H6, H8 Series

HORIZONTAL FURNACE : CROVE_H6,H8 SERIES

CROVE-HORIZONTAL Series constitutes the multipurpose chamber capable of manufacturing and processing
150 - 300mm circular wafers and 125 - 156mm tetragonal wafers.

  • Batch Size
    • Can batch process up to 25 to 250 wafers (1 Tube)
  • Application Process
    • LP-CVD, OXIDATION, ANNEAL
    • Batch Thermal Process Equipment
    • Thin Film Process Technology
    • High Temperature Anneal Equipment
  • Equipment Highlights
    • Capable of adding more processes and modification with 1 to 4 Tubes
    • Can use the wafer transfer tool capable of performing manual or fully automated loading
    • Can add the bubbler depending on the process
    • Increases utilization rate and reduces downtime with parts upgrade
    • Window-type operation enhancement