PRODUCT HORIZONTAL FURNACE : CROVE-M6, M8 Series

PRODUCT

HORIZONTAL FURNACE : CROVE-M6, M8 Series

MINI FURNACE : CROVE-M6, M8 Series

CROVE-Mini Type Series comprise of Mini Type Chamber which can be used at the college lab and research institution.

  • Wafer Size
    • Can use up to 200mm including the wafer test piece
  • Batch Size
    • Can batch process up to 1 to 50 wafers (1 Tube)
  • Application Process
    • LP-CVD, OXIDATION, ANNEAL
    • Batch Thermal Process Equipment
    • Thin Film Process Technology
    • High Temperature Anneal Equipment
  • Equipment Highlights
    • Capable of adding more processes and modification with 1 to 4 Tubes
    • Easy to form a layout with the Mini Type
    • Can add the bubbler depending on the process
    • Increases utilization rate and reduces downtime with parts upgrade
    • Window-type operation enhancement