PART DEVELOP Boat Wafer Mapping System

PART DEVELOP

Boat Wafer Mapping System

Boat Wafer Mapping System

To prevent any secondary accident due to collision of WTR's driving part and interference with the wafer
caused by a broken wafer, which is an issue caused by the heat stress during lowered temperature after the processing and unloading

 
 
 
  • 1) Wafer Detecting Sensor
    • Fiber Sensor that detects a wafer.
  • 2) Black Box
    • RCan record while robot is moving
    • Can download by connecting online with Pendant to check the recording
  • 3) Driving Part
    • Motor-based driving unit for Up & Down movement
    • Swing & Stroke Cylinder driving unit for the mapping sensor
    • Utilizes filter cover space to minimize the interference with E-axis
  • 4) Boat Position Sensor
    • A sensor separately installed from the E-AXIS Home Sensor
    • The sensor for detecting the Boat Home Position.
  • 5) Transfer Position Sensor
    • The sensor additionally installed separately from the Z-AXIS Home Sensor
    • Interlock for preventing collision during Transfer Moving