PRODUCT WAFER AUTO LOADER

PRODUCT

WAFER AUTO LOADER

Wafer Auto Loader

Wafer Auto Loader는 생산자의 불편함 해결과 안전 작업을 위한 완전 자동화 된 웨이퍼 전송 장치입니다.

  • Wafer Size
    • Graphic Touch Panel
      • Boat loading
      • Boat unloading
      • Sequence
      • Operation
  • PLC Controller
    • PLC Controller
      • Motion
      • Safety Control
      • Sequence
      • Operation
  • MOTION UNIT
    • Gripper Driver
    • Load platform Driver
    • Y-Axis Driver
    • Z-Axis Driver
    • Gripper motor
    • Load platform motor
    • Y-Axis motor
    • Z-Axis motor
  • SAFETY & SENSOR UNIT
    • SAFETY
    • SENSOR