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PART DEVELOP
- Software Program
- KE CX3000 Main Controller (J1 Type)
- CROVE_NET (KE Communication Module)
- LED Touch Monitor (KE853,835/TEL Waves)
- TEL TS_4000 Monitor
- Robot 조정 단말기 (KE PROFORT/TEL HCT)
- Boat Wafer Mapping System
- Rotation Axis_Vibration Sensor
- Auto Pressure Control Valve (KE/TEL)
- KE Wafer Counter Sensor
- FORELINE CHAIN CLAMP
PART DEVELOP Rotation Axis_Vibration Sensor
PART DEVELOP
Rotation Axis_Vibration Sensor
- Software Program
- KE CX3000 Main Controller (J1 Type)
- CROVE_NET (KE Communication Module)
- LED Touch Monitor (KE853,835/TEL Waves)
- TEL TS_4000 Monitor
- Robot 조정 단말기 (KE PROFORT/TEL HCT)
- Boat Wafer Mapping System
- Rotation Axis_Vibration Sensor
- Auto Pressure Control Valve (KE/TEL)
- KE Wafer Counter Sensor
- FORELINE CHAIN CLAMP
Rotation Axis_Vibration Sensor
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개발 목적
- Rotation Magnetic Seal의 Life-Time 예측 불가
- Powder에 의한 진동 발생시 Visual Check 불가
- Elevator Up/Down시 발생되는 진동 예측 불가 (Ball Bearing Life Time 확인불가)
SYSTEM 구성
HARDWARE UNIT (RS485→)
CONVERTER (DC0~5V→)
MFC CONTROLLER
CX3000 MONITOR
HARDWARE UNIT (RS485→)