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Auto Pressure Control Valve (KE/TEL)

• Software Program
• KE CX3000 Main Controller (J1 Type)
• CROVE_NET (KE Communication Module)
• LED Touch Monitor (KE853,835/TEL Waves)
• TEL TS_4000 Monitor
• Robot 조정 단말기 (KE PROFORT/TEL HCT)
• Boat Wafer Mapping System
• Rotation Axis_Vibration Sensor
• Auto Pressure Control Valve (KE/TEL)
• KE Wafer Counter Sensor
• FORELINE CHAIN CLAMP