PART DEVELOP KE Wafer Counter Sensor

PART DEVELOP

KE Wafer Counter Sensor

KE Wafer Counter Sensor

부품 단종으로 인한 대체품 개발 및 호환 Test검증 완료 (SK System IC)

1 Category Specification
1 Applicable wafer 8inch
2 Number of channels 25ch / 26ch
3 Detection method Through beam
4 Wafer Pitch 6.35mm
5 Power supply DC24V ±10% ripple 10 or less
6 Current consumption 1.8W or less
7 Operation mode Dark ON
8 Output mode NPN open collector
9 Light source Infrared LED (830nm)
10 Output inhibit input Output inhibit ON : 1.5V or less OFF : 4V or more
11 Material Sensor unit : Polycamonate / Housing : Aluminum